CHANGES OF SURFACE-ACOUSTIC-WAVE VELOCITY ON Z-CUT LITAO3 SUBSTRATE BY PROTON-EXCHANGE AND POST-EXCHANGE ANNEALING

被引：11

作者：

HANO, K ^{[1
]}

CHUBACHI, N ^{[1
]}

SANNOMIYA, T ^{[1
]}

机构：

[1] TOHOKU UNIV,FAC ENGN,DEPT ELECT ENGN,SENDAI,MIYAGI 980,JAPAN

来源：

ELECTRONICS LETTERS | 1992年 / 28卷 / 25期

关键词：

SURFACE ACOUSTIC WAVE DEVICES; ACOUSTIC MICROSCOPY;

D O I：

10.1049/el:19921484

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The velocity of leaky surface-acoustic-waves (LSAWs) on proton-exchanged and annealed proton-exchanged Z-cut LiTaO3 substrates was measured by line-focus-beam (LFB) acoustic microscopy. It is revealed that the LSAW velocity is decreased from 3220 to 3000 m/s by the proton exchange and that the post-exchange annealing gives some recovery to the decreased velocity.

引用

页码：2306 / 2308

页数：3

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