共 20 条
[2]
FILM THICKNESS DEPENDENCE OF DIELECTRIC PROPERTY AND CRYSTAL-STRUCTURE OF PBTIO3 FILM PREPARED ON PT SIO2 SI SUBSTRATE BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1993, 32 (9B)
:4175-4178
[3]
FUNAKUBO H, 1991, NIPPON SERAM KYO GAK, V99, P1169, DOI 10.2109/jcersj.99.1169
[4]
FUNAKUBO H, 1991, NIPPON SERAM KYO GAK, V99, P248, DOI 10.2109/jcersj.99.248
[5]
Characterization of epitaxially grown CVD-Pb(Zr, Ti)O3 films with high deposition rate
[J].
Journal of the Ceramic Society of Japan. International ed.,
1994, 102 (02)
:114-118
[6]
FUNAKUBO H, 1992, J CVD, V1, P72
[8]
HERTLING GH, 1971, J AM CERAM SOC, V54, P303