ULTRAMICROHARDNESS MEASUREMENTS OF COATED SAMPLES

被引：8

作者：

WAGENDRISTEL, A

BANGERT, H

CAI, X

KAMINITSCHEK, A

机构：

[1] Technical Univ of Vienna, Vienna, Austria, Technical Univ of Vienna, Vienna, Austria

来源：

THIN SOLID FILMS | 1987年 / 154卷 / 1-2期

关键词：

GOLD AND ALLOYS - MICROSCOPIC EXAMINATION - SILICON AND ALLOYS;

D O I：

10.1016/0040-6090(87)90364-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Imaging of Vickers imprints for in situ hardness tests of insulating samples in a scanning electron microscope requires a conductive surface layer to avoid charging. The influence of such coatings on the measured hardness and the elimination of this effect by an extrapolation towards zero thickness of the layer are discussed theoretically. The method is checked by the example of gold-coated silicon.

引用

页码：199 / 206

页数：8