ELECTRON MICROSCOPE DIAGNOSTICS OF THIN FILM SPUTTERING

被引：11

作者：

MEDVED, DB

POPPA, H

机构：

来源：

关键词：

D O I：

10.1063/1.1728825

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1759 / &

共 9 条

[1]

KOEDAM M, 1961, THESIS STATE U UTREC

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MCKEOWN, D .

[3]

MEDVED D, 1961, ZPH125 PHYS SECT REP

[4]

MORGULIS ND, 1956, SOV PHYS JETP-USSR, V3, P52

[5]

POPPA H, 1961, 3 P S EL BEAM TECHN, P323

[6]

POPPA H, TO BE PUBLISHED

[7]

REIMER L, 1957, Z ANGEW PHYS, V9, P34

[8] SPUTTERING THRESHOLDS AND DISPLACEMENT ENERGIES [J].

STUART, RV ;

WEHNER, GK .

[9]

WEHNER GK, 1960, 2136 GEN MILLS INC R