SELF-ALIGNED UMOSFETS WITH A SPECIFIC ON-RESISTANCE OF 1 M-OMEGA. CM2

被引:26
作者
CHANG, HR
BLACK, RD
TEMPLE, VAK
TANTRAPORN, W
BALIGA, BJ
机构
关键词
D O I
10.1109/T-ED.1987.23240
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2329 / 2334
页数:6
相关论文
共 10 条
[1]  
CHANG HR, 1987, 45TH DEV RES C
[2]  
COHEN RW, 1980, IEEE T ELECTRON DEV, V27, P340
[3]  
FONASH SJ, 1985, SOLID STATE TECHNOL, V28, P201
[4]  
Horiguchi S., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P761
[5]   ELECTRON-MOBILITY IN INVERSION AND ACCUMULATION LAYERS ON THERMALLY OXIDIZED SILICON SURFACES [J].
SUN, SC ;
PLUMMER, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) :1497-1508
[6]   MODELING OF THE ON-RESISTANCE OF LDMOS, VDMOS, AND VMOS POWER TRANSISTORS [J].
SUN, SC ;
PLUMMER, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (02) :356-367
[7]  
Ueda D., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P638
[8]  
UEDA D, 1985, IEEE T ELECTRON DEV, V32, P2, DOI 10.1109/T-ED.1985.21900
[9]   THERMAL-STABILITY AND SECONDARY BREAKDOWN IN PLANAR POWER MOSFETS [J].
YOSHIDA, I ;
OKABE, T ;
KATSUEDA, M ;
OCHI, S ;
NAGATA, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (02) :395-398
[10]  
1986, POWERTECHNICS MA SEP, P14