THERMAL-OXIDATION AND RESISTIVITY OF TANTALUM NITRIDE FILMS

被引：20

作者：

BRADY, DP

FUSS, FN

GERSTENBERG, D

机构：

来源：

THIN SOLID FILMS | 1980年 / 66卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90383-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：287 / 302

页数：16

共 13 条

[1]

Berry R.W., 1968, THIN FILM TECHNOLOGY

[2]

BRADY DW, UNPUBLISHED

[3]

FISHER JS, 1968, 18TH P EL COMP C, P299

[4] EFFECTS OF NITROGEN METHANE + OXYGEN ON STRUCTURE + ELECTRICAL PROPERTIES OF THIN TANTALUM FILMS [J].

GERSTENBERG, D ;

CALBICK, CJ .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) :402-&

[5] PROPERTIES OF ANODIC FILMS FORMED ON REACTIVELY SPUTTERED TANTALUM [J].

GERSTENBERG, D .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (06) :542-+

[6] ON MECHANISM OF FORMATION OF THIN OXIDE LAYERS ON NICKEL [J].

HAUFFE, K ;

PETHE, L ;

SCHMIDT, R ;

MORRISON, SR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (05) :456-&

[7]

KUO CY, 1965, 1965 P EL COMP C WAS, P123

[8] OXIDATION OF METALS [J].

LAWLESS, KR .

REPORTS ON PROGRESS IN PHYSICS, 1974, 37 (02) :231-+

[9] MATERIAL CHARACTERIZATION OF TI-CU-NI-AU (TCNA) - NEW LOW-COST THIN-FILM CONDUCTOR SYSTEM [J].

MORABITO, JM ;

THOMAS, JH ;

LESH, NG .

IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING, 1975, 11 (04) :253-262

[10] TANTALUM FILM CAPACITORS WITH IMPROVED AC PROPERTIES [J].

ROTTERSMAN, MH ;

BILL, MJ ;

GERSTENBERG, D .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1978, 1 (02) :137-142

← 1 2 →