MATERIAL CHARACTERIZATION OF TI-CU-NI-AU (TCNA) - NEW LOW-COST THIN-FILM CONDUCTOR SYSTEM

被引:27
作者
MORABITO, JM [1 ]
THOMAS, JH [1 ]
LESH, NG [1 ]
机构
[1] BELL TEL LABS INC,ALLENTOWN,PA 18103
来源
IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING | 1975年 / 11卷 / 04期
关键词
D O I
10.1109/TPHP.1975.1135074
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:253 / 262
页数:10
相关论文
共 27 条
[1]  
ANTLER M, 1970, PLATING, V57, P615
[2]  
ARCHIBALD TF, 1965, T TMSAIME, V233, P837
[3]  
BADER WG, UNPUBLISHED DATA
[4]  
BILL MJ, UNPUBLISHED DATA
[5]   ION BACKSCATTERING ANALYSIS OF INTERDIFFUSION IN CU-AU THIN-FILMS [J].
BORDERS, JA .
THIN SOLID FILMS, 1973, 19 (02) :359-370
[6]  
DANILOVA EI, 1955, IZV AKAD NAUK SSSR O, V11, P25
[7]  
DARKEN LS, 1951, ATOM MOVEMENTS, P21
[8]  
ENGLISH AT, 1972, J ELECTRONIC MATERIA, V1
[9]   TERMINATION MATERIALS FOR THIN FILM RESISTORS [J].
FISHER, JS ;
HALL, PM .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (10) :1418-&
[10]  
FOSTER JF, UNPUBLISHED DATA