DIELECTRIC-PROPERTIES OF SRTIO3 THIN-FILMS USED IN HIGH-TC SUPERCONDUCTING FIELD-EFFECT DEVICES

被引：71

作者：

WALKENHORST, A

DOUGHTY, C

XI, XX

MAO, SN

LI, Q

VENKATESAN, T

RAMESH, R

机构：

[1] BELLCORE,RED BANK,NJ 07701

[2] UNIV MARYLAND,DEPT ELECT ENGN,COLLEGE PK,MD 20742

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 14期

关键词：

D O I：

10.1063/1.107204

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The dielectric constant-epsilon of thin epitaxial SrTiO3 films used as dielectric layers in high T(c) superconducting field-effect devices has been studied. Epsilon in these thin films was found to have much weaker dependence on temperature and applied electric field than the bulk material. The breakdown characteristics of gate structures containing SrTiO3 dielectric layers are strongly influenced by the metal used as the gate electrode.

引用

页码：1744 / 1746

页数：3

共 9 条

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