THE ENERGY-DISTRIBUTION OF IONS BOMBARDING ELECTRODE SURFACES IN RF PLASMA REACTORS

被引：55

作者：

METZE, A ^{[1
]}

ERNIE, DW ^{[1
]}

OSKAM, HJ ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 03期

关键词：

D O I：

10.1063/1.343002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：993 / 998

页数：6

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[8] APPLICATION OF THE PHYSICS OF PLASMA SHEATHS TO THE MODELING OF RF-PLASMA REACTORS [J].

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ERNIE, DW ;

OSKAM, HJ .

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[9]

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[10] ENERGY DISPERSION OF POSITIVE IONS EFFUSED FROM AN RF PLASMA [J].

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