THE DEPOSITION OF ALPHA-FE2O3 BY AEROSOL CHEMICAL-VAPOR-DEPOSITION

被引：20

作者：

MARTINEZ, A

PENA, J

LABEAU, M

GONZALEZCALBET, JM

VALLETREGI, M

机构：

[1] UNIV COMPLUTENSE MADRID,FAC FARM,DEPT QUIM INORGAN & BIOINORGAN,E-28040 MADRID,SPAIN

[2] INST MAGNETISMO APLICADO SALVADOR VELAYOS,E-28230 MADRID,SPAIN

[3] INST NATL POLYTECH GRENOBLE,MAT & GENIE PHYS LAB,CNRS,URA 1109,F-38402 ST MARTIN DHERES,FRANCE

来源：

JOURNAL OF MATERIALS RESEARCH | 1995年 / 10卷 / 05期

关键词：

D O I：

10.1557/JMR.1995.1307

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

alpha-Fe2O3 thin films have been deposited on Si(111) substrates at high temperatures (600-800 degrees C) by the spray pyrolysis method, Four different iron(III) beta-diketonates have been used as precursors in order to obtain polycrystalline films of good adherence, which have been characterized by x-ray diffraction, scanning electron microscopy, and magnetic measurements.

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页码：1307 / 1311

页数：5

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