THE DEPOSITION OF BAFE12O19 BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：27

作者：

DONAHUE, EJ ^{[1
]}

SCHLEICH, DM ^{[1
]}

机构：

[1] POLYTECH INST NEW YORK,BROOKLYN,NY 11201

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 12期

关键词：

D O I：

10.1063/1.350456

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the first successful use of metalorganic chemical vapor deposition (MOCVD) in the fabrication of ferromagnetic oxide thin films. A substituted acetylacetonate barium complex has been used with ferrocene in a horizontal hot wall MOCVD system to deposit both polycrystalline and c-axis preferred films of BaFe12O19. These films were examined for crystallinity, morphology, composition, and magnetic properties. Their magnetic properties were found to be consistent with films prepared by other techniques.

引用

收藏

页码：6013 / 6017

页数：5

相关论文

共 19 条

[1] THIN-FILM FERRITES FOR MICROWAVE AND MILLIMETER-WAVE APPLICATIONS [J].

ADAM, JD ;

KRISHNASWAMY, SV ;

TALISA, SH ;

YOO, KC .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1990, 83 (1-3) :419-424

[2]

BROCKMAN FG, 1977, CERAM B, V56, P216

[3] GARNET THIN-FILM DEPOSITED BY A NEW CHEMICAL VAPOR-DEPOSITION [J].

DESCHANVRES, JL ;

LANGLET, M ;

JOUBERT, JC .

THIN SOLID FILMS, 1989, 175 :281-285

[4] THE DEPOSITION OF ALKALINE-EARTH OXIDES BY ORGANOMETALLIC CVD [J].

DONAHUE, EJ ;

SCHLEICH, DM .

MATERIALS RESEARCH BULLETIN, 1991, 26 (11) :1119-1126

[5] DEFECTS IN NICKEL FERRITE THIN-FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].

FITZGERA.AG ;

ENGIN, R .

THIN SOLID FILMS, 1974, 20 (02) :317-327

[6] EPITAXIAL-GROWTH OF FERRITE [J].

GIBART, P ;

ROBBINS, M ;

KANE, AB .

JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) :166-171

[7]

HAMMOND GS, 1963, INORG CHEM, V2, P149

[8] CHEMICAL VAPOR-DEPOSITION OF MO, MFE2O4(M-NI AND CO) AND NI1-XFEXFE2O4 SINGLE-CRYSTALS [J].

ITO, S ;

MIYASHITA, H ;

YONEDA, N .

JOURNAL OF CRYSTAL GROWTH, 1985, 73 (01) :167-174

[9]

MEE JE, 1987, APPL PHYS LETT, V510, P289

[10] PREPARATION OF DOUBLE-LAYER HEXAGONAL FERRITE FILMS FOR HIGH-DENSITY LONGITUDINAL MAGNETIC RECORDING MEDIA [J].

MORISAKO, A ;

NAOE, M .

IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :815-817