THE DEPOSITION OF ALKALINE-EARTH OXIDES BY ORGANOMETALLIC CVD

A fundamental study on the CVD of thin film oxides of calcium, strontium and barium has been performed. We have synthesized two types of substituted acetyl-acetonate precursors of these elements and determined their volatilities as a function of temperature. Binary oxide films were deposited from both fluorinated reagents and methylated reagents under several oxidizing conditions. These experiments produced films of either the fluoride or carbonate phase of each element. Ternary oxides were deposited using both classes of precursors. Desired phases were deposited and characterized by X-ray diffraction (XRD), spectroscopic analysis detected impurities.