THE DEPOSITION OF ALKALINE-EARTH OXIDES BY ORGANOMETALLIC CVD

被引:3
作者
DONAHUE, EJ
SCHLEICH, DM
机构
[1] Polytechnic University, Brooklyn, NY
关键词
D O I
10.1016/0025-5408(91)90117-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A fundamental study on the CVD of thin film oxides of calcium, strontium and barium has been performed. We have synthesized two types of substituted acetyl-acetonate precursors of these elements and determined their volatilities as a function of temperature. Binary oxide films were deposited from both fluorinated reagents and methylated reagents under several oxidizing conditions. These experiments produced films of either the fluoride or carbonate phase of each element. Ternary oxides were deposited using both classes of precursors. Desired phases were deposited and characterized by X-ray diffraction (XRD), spectroscopic analysis detected impurities.
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页码:1119 / 1126
页数:8
相关论文
共 9 条
[1]  
DAT RVH, 1967, PHYS STATUS SOLIDI, V22, pK67
[2]   ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF STRONTIUM-TITANATE [J].
FEIL, WA ;
WESSELS, BW ;
TONGE, LM ;
MARKS, TJ .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (08) :3858-3861
[3]  
FUJIMOTO K, 1989, THIN FILM SOLIDS, V173, P1139
[4]   CRYSTALLIZATION PHENOMENA IN THIN-FILMS OF AMORPHOUS BARIUM HEXAFERRITE [J].
GERARD, P ;
LACROIX, E ;
MAREST, G ;
BLANCHARD, B ;
ROLLAND, G ;
ROLLAND, B ;
BECHEVET, B .
SOLID STATE COMMUNICATIONS, 1989, 71 (01) :57-62
[5]   CHELATES OF BETA-DIKETONES .5. PREPARATION AND PROPERTIES OF CHELATES CONTAINING STERICALLY HINDERED LIGANDS [J].
HAMMOND, GS ;
WU, CHS ;
NONHEBEL, DC .
INORGANIC CHEMISTRY, 1963, 2 (01) :73-&
[6]  
IIJIMA Y, 1988, JPN J APPL PHYS, V23, P401
[7]  
KUROSAWA H, 1989, J PHYSIQUE C, V5, P131
[8]   METALORGANIC CHEMICAL VAPOR-DEPOSITION OF BATIO3 THIN-FILMS [J].
KWAK, BS ;
ZHANG, K ;
BOYD, EP ;
ERBIL, A ;
WILKENS, BJ .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :767-772
[9]   CHEMICAL VAPOR-DEPOSITION OF YBA2CU3O7 USING METALORGANIC CHELATE PRECURSORS [J].
PANSON, AJ ;
CHARLES, RG ;
SCHMIDT, DN ;
SZEDON, JR ;
MACHIKO, GJ ;
BRAGINSKI, AI .
APPLIED PHYSICS LETTERS, 1988, 53 (18) :1756-1758