ENERGY ANALYZED SECONDARY ION MASS-SPECTROSCOPY AND SIMULTANEOUS AUGER AND XPS MEASUREMENTS OF ION BOMBARDED SURFACES

被引:41
作者
KRAUSS, AR
GRUEN, DM
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期
关键词
D O I
10.1016/0029-554X(78)90924-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:547 / 552
页数:6
相关论文
共 24 条
[1]  
Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]
[2]   INELASTIC-COLLISIONS AT ION BOMBARDED SURFACE .1. STUDIES IN SECONDARY ION AND PHOTON EXCITATION [J].
BAYLY, AR ;
MARTIN, PJ ;
MACDONALD, RJ .
NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :459-466
[3]  
Benninghoven A., 1974, International Journal of Mass Spectrometry and Ion Physics, V13, P415, DOI 10.1016/0020-7381(74)83021-4
[4]   SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS) [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1973, 35 (01) :427-457
[5]  
CASTAING R, 1971, ADV MASS SPECTROM, V5, P419
[6]   OXIDATION OF ALUMINUM STUDIED BY SIMS AT LOW ENERGIES [J].
DAWSON, PH .
SURFACE SCIENCE, 1976, 57 (01) :229-240
[7]   QUANTITATIVE COMPARISON OF TI AND TIO SURFACES USING AUGER-ELECTRON AND SOFT-X-RAY APPEARANCE POTENTIAL SPECTROSCOPIES [J].
GRANT, JT ;
HAAS, TW ;
HOUSTON, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :227-230
[8]   RESOLUTION AND SENSITIVITY OF SPHERICAL-GRID RETARDING POTENTIAL ANALYZER [J].
HUCHITAL, DA ;
RIGDEN, JD .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) :2291-&
[9]   HYPERTHERMAL BEAMS SPUTTERED FROM ALKALI-HALIDE SURFACES [J].
KONNEN, GP ;
GROSSER, J ;
HARING, A ;
DEVRIES, AE ;
KISTEMAKER, J .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (03) :171-179
[10]  
KRAUSS A, 1977, APPL PHYS, V14