DEPOSITION OF THIN METAL AND METAL SILICIDE FILMS FROM THE DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS

被引：43

作者：

DOWBEN, PA ^{[1
]}

SPENCER, JT ^{[1
]}

STAUF, GT ^{[1
]}

机构：

[1] SYRACUSE UNIV, DEPT CHEM, SOLID STATE SCI, SYRACUSE, NY 13244 USA

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 2卷 / 04期

关键词：

D O I：

10.1016/0921-5107(89)90007-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：297 / 323

页数：27

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