LUMINESCENCE ASSOCIATED WITH THE PRESENCE OF DISLOCATIONS IN SILICON

被引:39
作者
LIGHTOWLERS, EC
HIGGS, V
机构
[1] Physics Department, King's College London
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 138卷 / 02期
关键词
D O I
10.1002/pssa.2211380237
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A brief account is given of some recent investigations of the luminescence associated with the presence of dislocations in silicon. These investigations show that transition metal contamination is necessary for dislocation related luminescence to be observed in plastically-deformed float-zone silicon and in material containing epitaxial and oxidation-induced stacking faults. Cathodoluminescence spectroscopy and imaging measurements, and photoluminescence measurements on material with low densities of grown-in dislocations, imply that the D3 and D4 luminescence features originate in the dislocation cores, whereas the D1 and D2 features are associated with point defects trapped in the strain fields of dislocations.
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页码:665 / 672
页数:8
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