NOVEL PLATINUM-TIN OXIDE-SILICON NITRIDE-SILICON DIOXIDE-SILICON GAS-SENSING COMPONENT FOR OXYGEN AND CARBON-MONOXIDE GASES AT LOW-TEMPERATURE

被引：18

作者：

KANG, WP

KIM, CK

机构：

[1] Solid State Microelectronic Laboratory, Department of Electrical Engineering, Vanderbilt University, Nashville

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.110012

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel gas sensing component based on a platinum-tin oxide-silicon nitride-silicon dioxide-silicon metal-insulator-semiconductor (MIS) capacitor has been developed. The new approach to integrate the catalytic properties of platinum (Pt) and the gas sensing properties of tin oxide (SnO(x)) with the surface-sensitive silicon MIS capacitor enhances the gas detection at lower temperature. The device is capable of detecting oxygen (O2) and carbon monoxide (CO) gases at room ambient and at temperature much lower than the operating temperature of the conventional solid state gas detectors. The gas sensing characteristics of the device and its detection mechanism for O2 and CO at 27-100-degrees-C are presented.

引用

页码：421 / 423

页数：3

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