PALLADIUM AND PLATINUM GATE METAL-OXIDE-SEMICONDUCTOR CAPACITORS IN HYDROGEN AND OXYGEN MIXTURES

被引：48

作者：

ARMGARTH, M

SODERBERG, D

LUNDSTROM, I

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 07期

关键词：

D O I：

10.1063/1.93638

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：654 / 655

页数：2

共 16 条

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