AUGER STUDY OF PREFERRED SPUTTERING ON AG-AU ALLOY SURFACES

被引:67
作者
HO, PS
LEWIS, JE
HOWARD, JK
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词
D O I
10.1116/1.569199
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:322 / 325
页数:4
相关论文
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