75TH ANNIVERSARY REVIEW SERIES - EVOLUTION OF SILICON SEMICONDUCTOR TECHNOLOGY - 1952-1977

被引：17

作者：

DEAL, BE

EARLY, JM

机构：

[1] Fairchild Camera, Instrument Corporation, Research and Development Laboratory, Palo Alto

来源：

关键词：

D O I：

10.1149/1.2128981

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

[No abstract available]

引用

页码：C20 / C32

页数：13

共 229 条

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HINGARH, HK ;

OBRIEN, D ;

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