SURFACE POLARITY AND ETCHING OF BETA-SILICON CARBIDE

被引：10

作者：

BARTLETT, RW

BARLOW, M

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 11期

关键词：

D O I：

10.1149/1.2407338

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：1436 / &

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