NB3GE PREPARED BY HIGH-RATE SPUTTERING IN A CONTAINER COOLED BY LIQUID N-2

被引：6

作者：

OGUSHI, T

WATANABE, T

YUDA, M

KANEKO, Y

HAKURAKU, Y

NUMATA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷 / 10期

关键词：

D O I：

10.1143/JJAP.19.2003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2003 / 2009

页数：7

共 27 条

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