A NOVEL SEM WITH SPIN POLARIZATION ANALYSIS

被引:5
作者
BROWNING, R
VANZANDT, T
HELMS, CR
POPPA, H
LANDOLT, M
机构
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 94120
[2] SWISS FED INST TECHNOL,CH-8093 ZURICH,SWITZERLAND
关键词
D O I
10.1016/0368-2048(90)80163-5
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A scanning electron microscope with polarization analysis has been built using an Auger microprobe and a Mott analyser. The instrument uses a high brightness field emission source and has an analytical spatial resolution of <100nm. The instrument has a novel geometry, with the electron gun, energy analyser, and Mott analyser coaxial on a axis normal to the the sample surface. The detection plane of the Mott analyser is parallel to the in-plane magnetization of the sample surface. Spin polarized micrographs of domains at the surface of a Fe-4%Si single crystal show that, even at low magnifications, the scan related asymmetries are minor, and the interpretation of the signal contrast is straightforward. © 1990.
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页码:315 / 320
页数:6
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