SI-H VIBRATIONAL PROPERTIES IN CRYSTALLIZED HYDROGENATED SILICON FABRICATED BY REACTIVE SPUTTERING IN H-2 ATMOSPHERE

被引：25

作者：

HIRAKI, A

IMURA, T

MOGI, K

TASHIRO, M

机构：

来源：

JOURNAL DE PHYSIQUE | 1981年 / 42卷 / NC4期

关键词：

D O I：

10.1051/jphyscol:1981459

中图分类号：

学科分类号：

摘要：

引用

收藏

页码：277 / 280

页数：4

相关论文

共 4 条

[1] SPONTANEOUS INCLUSION OF OXYGEN IN SPUTTER-DEPOSITED AMORPHOUS-SILICON DURING AND AFTER FABRICATION
IMURA, T
USHITA, K
HIRAKI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (02) : L65 - L68
[2] IMURA T, UNPUB SOL ST COMM
[3] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS
LUCOVSKY, G
[J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576
[4] CORRELATION OF THE SIH STRETCHING FREQUENCY WITH MOLECULAR STRUCTURE
SMITH, AL
ANGELOTTI, NC
[J]. SPECTROCHIMICA ACTA, 1959, 15 (06): : 412 - 420