SILICON-GATE N-WELL CMOS PROCESS BY FULL ION-IMPLANTATION TECHNOLOGY

被引:32
作者
OHZONE, T
SHIMURA, H
TSUJI, K
HIRAO, T
机构
关键词
D O I
10.1109/T-ED.1980.20104
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1789 / 1795
页数:7
相关论文
共 13 条
[1]  
APPELS JA, 1970, PHILIPS RES REP, V25, P118
[2]  
Black W. C. Jr., 1976, International Electron Devices Meeting. (Technical digest), P331
[3]  
CLEMENS JT, 1974, P ELECTROCHEM SOC M, P125
[4]  
CRAWFORD RH, 1967, MOSFET CIRCUIT DESIG, P40
[5]  
DAWSON R, 1977, RCA REV, V38, P406
[6]   DESIGN OF ION-IMPLANTED MOSFETS WITH VERY SMALL PHYSICAL DIMENSIONS [J].
DENNARD, RH ;
GAENSSLEN, FH ;
YU, HN ;
RIDEOUT, VL ;
BASSOUS, E ;
LEBLANC, AR .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1974, SC 9 (05) :256-268
[7]  
GROVE AS, 1967, PHYS TECHNOL S, P49
[8]  
INOUE K, UNPUBLISHED
[9]  
Masuhara T., 1978, IEEE INT SOL STAT CI, P110
[10]  
OHZONE T, 1978, IEDM, P360