POLY (FLUORO METHACRYLATE) AS HIGHLY SENSITIVE, HIGH CONTRAST POSITIVE RESIST

被引：70

作者：

KAKUCHI, M ^{[1
]}

SUGAWARA, S ^{[1
]}

MURASE, K ^{[1
]}

MATSUYAMA, K ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP,IBARAKI ELECT COMMUN LAB,TOKAI,IBARAKI 319-11,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 10期

关键词：

D O I：

10.1149/1.2133127

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1648 / 1651

页数：4

相关论文

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