EFFECT OF SUBSTRATE-TEMPERATURE AND COMPOSITION ON THE CRYSTALLINE STATE OF BA2YCU3O7-DELTA MAGNETRON-SPUTTERED THIN-FILMS

被引：12

作者：

SHIRAKAWA, Y

KOBAYASHI, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 08期

关键词：

D O I：

10.1143/JJAP.28.L1405

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1405 / L1407

页数：3

共 8 条

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[2]

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (07) :L1260-L1261

[7] SPUTTER SYNTHESIS OF BA2YCU3OY AS-DEPOSITED SUPERCONDUCTING THIN-FILMS FROM STOICHIOMETRIC TARGET - A MECHANISM OF COMPOSITIONAL DEVIATION AND ITS CONTROL [J].

TERADA, N ;

IHARA, H ;

JO, M ;

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (04) :L639-L642

[8] SINGLE-CRYSTAL YBA2CU3O7-X THIN-FILMS BY ACTIVATED REACTIVE EVAPORATION [J].

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