SPUTTER SYNTHESIS OF BA2YCU3OY AS-DEPOSITED SUPERCONDUCTING THIN-FILMS FROM STOICHIOMETRIC TARGET - A MECHANISM OF COMPOSITIONAL DEVIATION AND ITS CONTROL

被引：70

作者：

TERADA, N

IHARA, H

JO, M

HIRABAYASHI, M

KIMURA, Y

MATSUTANI, K

HIRATA, K

OHNO, E

SUGISE, R

KAWASHIMA, F

机构：

[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN

[2] TOKUYAMA SODA CO LTD,MINATO KU,TOKYO 105,JAPAN

[3] ANELVA CO LTD,FUCHU,TOKYO 183,JAPAN

[4] SHARP CO LTD,TENRI,NARA 632,JAPAN

[5] UBE IND LTD,UBE,YAMAGUCHI 805,JAPAN

[6] NIHON UNIV,FUNABASHI,CHIBA 274,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1988年 / 27卷 / 04期

关键词：

D O I：

10.1143/JJAP.27.L639

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L639 / L642

页数：4

共 12 条

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[5] SYNTHESIS OF Y-BA-CU-O THIN-FILMS ON SAPPHIRE SUBSTRATES BY RF MAGNETRON SPUTTERING [J].

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[6]

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[7]

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[8]

SOSHIAK J, 1971, JPN J APPL PHYS, V42, P1802

[9] DEPOSITION OF SRXLA2-XCUO4-Y THIN-FILMS BY SPUTTERING [J].

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