A method for interpreting the data from depth-sensing indentation instruments

被引：2185

作者：

Doerner, M. F. ^{[1
,2
]}

Nix, W. D. ^{[2
]}

机构：

[1] IBM Corp, Div Gen Prod, San Jose, CA 95193 USA

[2] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 1986年 / 1卷 / 04期

关键词：

D O I：

10.1557/JMR.1986.0601

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Depth-sensing indentation instruments provide a means for studying the elastic and plastic properties of thin films. A method for obtaining hardness and Young's modulus from the data obtained from these types of instruments is described. Elastic displacements are determined from the data obtained during unloading of the indentation. Young's modulus can be calculated from these measurements. In addition, the elastic contribution to the total displacement can be removed in order to calculate hardness. Determination of the exact shape of the indenter at the tip is critical to the measurement of both hardness and elastic modulus for indentation depths less than a micron. Hardness is shown to depend on strain rate, especially when the hardness values are calculated from the data along the loading curves.

引用

页码：601 / 609

页数：9

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