A TUNABLE, ULTRAHIGH-SPECTRAL-BRIGHTNESS ARF EXCIMER LASER SOURCE

被引：29

作者：

EGGER, H

SRINIVASAN, T

HOHLA, K

SCHEINGRABER, H

VIDAL, CR

PUMMER, H

RHODES, CK

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 01期

关键词：

D O I：

10.1063/1.92555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：37 / 39

页数：3

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