THIN-FILMS OF IONIC AND MIXED CONDUCTIVE GLASSES - THEIR USE IN MICRODEVICES

被引：14

作者：

CREUS, R ^{[1
]}

SARRADIN, J ^{[1
]}

RIBES, M ^{[1
]}

机构：

[1] UNIV MONTPELLIER 2, PHYSICOCHIM MAT SOLIDES LAB, URA D0407, F-34095 MONTPELLIER 5, FRANCE

来源：

SOLID STATE IONICS | 1992年 / 53卷 / pt 1期

关键词：

D O I：

10.1016/0167-2738(92)90441-Q

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The development of microdevices (microbatteries and microsensors) using ionic and mixed conductive glasses is envisaged. Thin glass films, obtained by microelectronic techniques (thermal evaporation, RF sputtering and PECVD), can be utilized either as electrolyte and cathode materials in energy storage devices or as sensitive membranes in electrochemical sensors (ISFET or Potentiometric types). The electrical and electrochemical properties of oxide or chalcogenide thin vitreous films (electrolytes, cathode material and sensitive membranes) are described. The characteristics of the following microdevices: Li/Li2S-SiS2-P2S5 LiI/GeSe5.5, Li/Li2S-SiS2-P2S5 LiI/LiI/B2O3-V2O5 as microbatteries and Au/Si/SiO2/Ag/AgCl-NaCl/Al2O3-SiO2-Na2O as modified ISFET are presented.

引用

页码：641 / 646

页数：6

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