THE RESOLUTION LIMIT FOR ELEMENTAL MAPPING IN ENERGY-FILTERING TRANSMISSION ELECTRON

被引：17

作者：

KOHL, H ^{[1
]}

BERGER, A ^{[1
]}

机构：

[1] TH DARMSTADT,INST ANGEW PHYS,D-64289 DARMSTADT,GERMANY

来源：

ULTRAMICROSCOPY | 1995年 / 59卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(95)00028-Y

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

In recent years electron microscopes with energy filtering devices have found widespread acceptance. Combined with an effective detection system, such as a slow-scan CCD camera, these microscopes allow the rapid acquisition of elemental maps of large areas, Due to the low cross-sections for the relevant inner-shell excitations, the resolution attainable with a given object is limited by the signal-to-noise ratio. We shall propose a resolution criterion which includes the statistical properties of the images and discuss the dependence of this ''object resolution limit'' on instrumental parameters.

引用

页码：191 / 194

页数：4

共 10 条

[1]

BERGER A, 1992, OPTIK, V92, P175

[2] APPLICATIONS OF SLOW-SCAN CCD CAMERAS IN TRANSMISSION ELECTRON-MICROSCOPY [J].