WIDE-BANDWIDTH ELECTROMECHANICAL ACTUATORS FOR TUNNELING DISPLACEMENT TRANSDUCERS

被引：26

作者：

KENNY, TW ^{[1
]}

KAISER, WJ ^{[1
]}

ROCKSTAD, HK ^{[1
]}

REYNOLDS, JK ^{[1
]}

PODOSEK, JA ^{[1
]}

VOTE, EC ^{[1
]}

机构：

[1] CALTECH,JET PROP LAB,CTR SPACE MICROELECTR TECHNOL,PASADENA,CA 91109

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1994年 / 3卷 / 03期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/84.311559

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A series of displacement transducers have been demonstrated which are based on the detection of electrons that quantum-mechanically tunnel across a narrow gap between electrodes, These transducers have important applications due to the sensitivity of the tunneling mechanism to sub-Angstrom variations in the electrode gap. In this paper, we describe the recent development of wide-bandwidth electromechanical actuators and simple feedback circuitry which have been adapted for use in tunneling displacement transducers. With these actuators and circuits, we have built tunneling transducers with control bandwidths well in excess of 10 kHz, The design, fabrication, operation, and applications of these actuators are described. [69]

引用

页码：97 / 104

页数：8

共 23 条

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