FINITE-ELEMENT ANALYSIS OF THE THERMAL HISTORY FOR CZOCHRALSKI GROWTH OF LARGE DIAMETER SILICON SINGLE-CRYSTALS

被引：12

作者：

VIRZI, A

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 97卷 / 01期

关键词：

D O I：

10.1016/0022-0248(89)90257-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

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页码：152 / 161

页数：10

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[1] ANTTILA OJ, 1986, MATER RES SOC S P, V59, P323
[2] RADIATIVE HEAT-EXCHANGE IN CZOCHRALSKI CRYSTAL-GROWTH
ATHERTON, LJ
DERBY, JJ
BROWN, RA
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 84 (01) : 57 - 78
[3] THERMAL-CAPILLARY ANALYSIS OF CZOCHRALSKI AND LIQUID ENCAPSULATED CZOCHRALSKI CRYSTAL-GROWTH .1. SIMULATION
DERBY, JJ
BROWN, RA
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 74 (03) : 605 - 624
[4] NUMERICAL-CALCULATION OF THE GLOBAL HEAT-TRANSFER IN A CZOCHRALSKI FURNACE
DUPRET, F
RYCKMANS, Y
WOUTERS, P
CROCHET, MJ
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) : 84 - 91
[5] TEMPERATURE PROFILE AND THERMAL-STRESS CALCULATIONS IN GAAS CRYSTALS GROWING FROM THE MELT
DUSEAUX, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 61 (03) : 576 - 590
[6] THE EVOLUTION AND MODELING OF THE CZOCHRALSKI GROWTH TECHNIQUE
HURLE, DTJ
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 85 (1-2) : 1 - 8
[7] ANALYTICAL REPRESENTATION OF THE SHAPE OF THE MENISCUS IN CZOCHRALSKI GROWTH
HURLE, DTJ
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 63 (01) : 13 - 17
[8] Incropera F.P., 1985, FUNDAMENTALS HEAT MA, V2nd ed.
[9] Kreith F., 1964, PRINCIPLES HEAT TRAN
[10] OSTRACH S, 1966, 3RD P INT HEAT TRANS, V6