THE EVOLUTION AND MODELING OF THE CZOCHRALSKI GROWTH TECHNIQUE

被引：11

作者：

HURLE, DTJ

机构：

[1] Royal Signals & Radar, Establishment, Great Malvern, Engl, Royal Signals & Radar Establishment, Great Malvern, Engl

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 85卷 / 1-2期

关键词：

MATHEMATICAL TECHNIQUES - Transfer Functions;

D O I：

10.1016/0022-0248(87)90197-7

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The historical development of Czochralski growth is briefly outlined and the importance of process modeling to the further extension of the technique is discussed. Milestones in the evolution of process modeling are noted and work in the author's laboratory on transfer function determination is outlined. The effects of an applied magnetic field on segregation are described. Finally, the advantages and future potential of the Czochralski technique are considered.

引用

页码：1 / 8

页数：8

共 48 条

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