OPTICAL-EMISSION DIAGNOSTICS OF LASER-INDUCED PLASMA FOR DIAMOND-LIKE FILM DEPOSITION

Optical emission from a laser-induced plasma plume is recorded during KrF excimer laser ablation of graphite in a gas mixture of Ar and H2 (3 %) for deposition of diamond-like thin films. At sub-GW/cm2 laser intensities the spectrum is dominated by the bands of C2 and CN. From the band intensities, the vibrational temperatures of both radicals are calculated to be 12-15 x 10(3) K, and their concentrations are estimated to be 5 x 10(14) cm-3 and 2 x 10(14) cm-3, respectively.