SOME DEVICE APPLICATIONS OF SPREADING RESISTANCE MEASUREMENTS ON EPITAXIAL SILICON

被引:6
作者
MORRIS, BL [1 ]
机构
[1] BELL TEL LABS INC,ALLENTOWN,PA 18103
关键词
D O I
10.1149/1.2401829
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:422 / 426
页数:5
相关论文
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