ANALYSIS OF AMORPHOUS LAYERS ON SILICON BY BACKSCATTERING AND CHANNELING EFFECT MEASUREMENTS

被引：93

作者：

MEYER, O

GYULAI, J

MAYER, JW

机构：

来源：

SURFACE SCIENCE | 1970年 / 22卷 / 02期

关键词：

D O I：

10.1016/0039-6028(70)90081-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：263 / &

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