LASER PHOTOCHEMICAL MICROALLOYING FOR ETCHING OF ALUMINUM THIN-FILMS

[1] BAMFORD CH, 1972, COMPREHENSIVE CHEM K, V4, P290

[2] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[3] DUNLOP AN, 1970, CAN J CHEM, V48, P3205

[4] EHRLICH DJ, 1980, APPL PHYS LETT, V36, P916, DOI 10.1063/1.91366

[5] APPLICATION OF BACKSCATTERING METHOD FOR MEASUREMENT OF DIFFUSION OF ZINC IN ALUMINUM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 15 (01): : 113 - 119

[6] GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS .1. ISOLATED GRAIN-BOUNDARY [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 3792 - 3798

[7] GUPTA D, 1978, THIN FILMS INTERDIFF

[8] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[9] HERNDON TO, UNPUBLISHED

[10] THIN ZINC FILMS ON ALUMINUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : 573 - 578

[1] BAMFORD CH, 1972, COMPREHENSIVE CHEM K, V4, P290

[2] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[3] DUNLOP AN, 1970, CAN J CHEM, V48, P3205

[4] EHRLICH DJ, 1980, APPL PHYS LETT, V36, P916, DOI 10.1063/1.91366

[5] APPLICATION OF BACKSCATTERING METHOD FOR MEASUREMENT OF DIFFUSION OF ZINC IN ALUMINUM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 15 (01): : 113 - 119

[6] GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS .1. ISOLATED GRAIN-BOUNDARY [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 3792 - 3798

[7] GUPTA D, 1978, THIN FILMS INTERDIFF

[8] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[9] HERNDON TO, UNPUBLISHED

[10] THIN ZINC FILMS ON ALUMINUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : 573 - 578