MAGNETIC-PROPERTIES OF FE ALLOY PERMALLOY MULTILAYERED FILMS

被引：3

作者：

OHJI, H ^{[1
]}

TANABE, S ^{[1
]}

KATAOKA, M ^{[1
]}

OZEKI, T ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CORP,MAT & ELECTR DEEVICES LAB,8-1-1 TSUKAGUCHI HONMACHI,AMAGASAKI,HYOGO 661,JAPAN

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1994年 / 134卷 / 2-3期

关键词：

D O I：

10.1016/0304-8853(94)00258-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fe-Si/Permalloy and Fe-Ni/Permalloy multilayered films were prepared by a conventional rf sputtering method. A Permalloy interlayer is effective in obtaining high initial permeability and a good correlation between the permeability and the (110)/(211) X-ray diffraction intensity ratio was found. This result indicates that the crystal orientation of grains plays an important role in obtaining a high initial permeability. The permeability of the Fe-Si/ Permalloy multilayered films decreases after annealing processes above 400-degrees-C because of the diffusion of Ni atoms into the Fe-Si alloy layer. To prevent the influence of Ni diffusion and also to improve the thermal stability, the thickness ratio of Fe-Si/Permalloy was found to be important.

引用

页码：292 / 297

页数：6

共 6 条

[1] MAGNETIC-PROPERTIES OF MULTILAYERED FE-C FILM FORMED BY DUAL ION-BEAM SPUTTERING [J].