ELECTRIC CHARGING OF THIN INSULATING FILM BY X-RADIATION

This study deals with the electric charging of thin insulating films by X-radiation during ESCA (electron spectroscopy of chemical analysis) measurements. The effect of charging on the value of the kinetic energy for electrons emitted from the specimen surface was obtained on the assumption that there is no charging when either the X-ray intensity or thickness of the insulating film is zero. By measuring the kinetic energy for various X-ray intensities and by extrapolating to zero intensity, it was found that the kinetic energy of C1s electrons emitted from an adsorption layer on Cu shifted to a lower value by as much as 2 eV.