THE HIGH-PERFORMANCE BEAM DEFLECTION SYSTEM OF EL3

被引：8

作者：

HO, CT

MICHAIL, MS

STICKEL, W

WOODARD, OC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571170

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1069 / 1073

页数：5

共 8 条

[1]

LOUGHRAN JF, 1976, IEDM437 TECH DIG

[2]

MICHAIL MS, MICROCIRCUIT ENG 79, P71

MOORE, RD ;

CACCOMA, GA ;

PFEIFFER, HC ;

WEBER, EV ;

WOODARD, OC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :950-952

[4]

Ritz E. F. Jr., 1979, Advances in electronics and electron physics, vol.49, P299

[5]

STICKEL W, 1978, 8TH P INT C EL ION B, P32

[6]

STURANS MA, 1980, 9TH P INT C EL ION B, P33

[7] VARIABLE SPOT SHAPE CONTROL ELECTRONICS [J].

WOODARD, OC ;

HO, CT ;

MICHAIL, MS ;

MUIR, AW ;

WILLIAMS, MC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1783-1786

[8]

WOODARD OC, 1980, 9TH P INT C EL ION B, P44