MOLECULAR-BEAM HOMOEPITAXIAL GROWTH OF MGO(001)

被引:50
作者
CHAMBERS, SA
TRAN, TT
HILEMAN, TA
机构
[1] Molecular Science Research Center, Pacific Northwest Laboratory
关键词
D O I
10.1557/JMR.1994.2944
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We describe homoepitaxial growth and detailed in situ characterization of MgO(001). We have used, for the first time, high-speed Auger electron spectroscopy as a real-time probe of film composition during growth. Excellent short-range and long-range crystallographic order are achieved in films grown to a thickness of several hundred angstroms in the substrate temperature range of 450 degrees C to 750 degrees C. Moreover, the films become more laminar as the growth temperature increases, suggesting that MgO grows homoepitaxially by the step-flow growth mechanism at elevated temperature. The surfaces of films grown at 650 degrees and 750 degrees C are smoother than those obtained by cleaving MgO(001).
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收藏
页码:2944 / 2952
页数:9
相关论文
共 26 条
  • [1] REACTIVE CONDENSATION AND MAGNETIC-PROPERTIES OF IRON-OXIDE FILMS
    BANDO, Y
    HORII, S
    TAKADA, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (06) : 1037 - 1042
  • [2] PREPARATION AND PROPERTIES OF MGO SINGLE-CRYSTALS GROWN BY CHEMICAL VAPOR-DEPOSITION
    BOOTH, JR
    KINGERY, WD
    BOWEN, HK
    [J]. JOURNAL OF CRYSTAL GROWTH, 1975, 29 (03) : 257 - 262
  • [3] HIGH-ENERGY AUGER AND MEDIUM-ENERGY BACKSCATTERED ELECTRON-DIFFRACTION AS A PROBE OF ULTRA-THIN EPITAXIAL OVERLAYERS, SANDWICHES AND SUPERLATTICES
    CHAMBERS, SA
    VITOMIROV, IM
    ANDERSON, SB
    CHEN, HW
    WAGENER, TJ
    WEAVER, JH
    [J]. SUPERLATTICES AND MICROSTRUCTURES, 1987, 3 (05) : 563 - 571
  • [4] EPITAXIAL FILM CRYSTALLOGRAPHY BY HIGH-ENERGY AUGER AND X-RAY PHOTOELECTRON DIFFRACTION
    CHAMBERS, SA
    [J]. ADVANCES IN PHYSICS, 1991, 40 (04) : 357 - 415
  • [5] STRONGLY Z-DEPENDENT AUGER AND PHOTOELECTRON DIFFRACTION IN MGO(001)
    CHAMBERS, SA
    TRAN, TT
    [J]. SURFACE SCIENCE, 1994, 314 (02) : L867 - L871
  • [6] Cox P. A., 1994, SURFACE SCI METAL OX
  • [7] STRUCTURAL CHARACTERIZATION OF MGO(100) SURFACES
    DURIEZ, C
    CHAPON, C
    HENRY, CR
    RICKARD, JM
    [J]. SURFACE SCIENCE, 1990, 230 (1-3) : 123 - 136
  • [8] X-RAY PHOTOELECTRON AND AUGER-ELECTRON FORWARD SCATTERING - A NEW TOOL FOR SURFACE CRYSTALLOGRAPHY
    EGELHOFF, WF
    [J]. CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1990, 16 (03) : 213 - 235
  • [9] FINAL-STATE EFFECTS IN PHOTOELECTRON DIFFRACTION
    FRIEDMAN, DJ
    FADLEY, CS
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1990, 51 : 689 - 700
  • [10] MICROSTRUCTURE OF PBTIO3 THIN-FILMS DEPOSITED ON (001)MGO BY MOCVD
    GAO, Y
    BAI, G
    MERKLE, KL
    SHI, Y
    CHANG, HLM
    SHEN, Z
    LAM, DJ
    [J]. JOURNAL OF MATERIALS RESEARCH, 1993, 8 (01) : 145 - 153