APPARATUS SURFACE CONDITIONING EFFECTS IN COPPER SULFIDE REACTIVE SPUTTERING FOR PHOTO-VOLTAIC APPLICATIONS

被引：15

作者：

THORNTON, JA ^{[1
]}

CORNOG, DG ^{[1
]}

HALL, RB ^{[1
]}

DINETTA, LC ^{[1
]}

机构：

[1] UNIV DELAWARE,INST ENERGY CONVERS,NEWARK,DE 19711

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571285

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：296 / 299

页数：4

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