Influence of the Pt electrode on the properties of sol-gel PZT-films

被引：24

作者：

Willems, GJ

Wouters, DJ

Maes, HE

机构：

[1] IMEC, B-3001 Leuven

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00149-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of the Pt bottom electrode on the nucleation and the preferential orientation of sol-gel PZT-films is investigated. New experimental evidence for the crucial role of Ti in Pt/Ti-electrodes is presented. A qualitative crystallization model which can explain both the nucleation mechanism as well as the observed preferential orientation is proposed. The importance of annealing in oxygen of the Pt/Ti-electrode is shown.

引用

页码：217 / 220

页数：4

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