PREPARATION OF AMORPHOUS SI3N4-C PLATE BY CHEMICAL VAPOR-DEPOSITION

被引：42

作者：

HIRAI, T

GOTO, T

机构：

来源：

关键词：

D O I：

10.1007/BF00552054

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：17 / 23

页数：7

共 23 条

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