CHARACTERIZATION OF PHOSPHORUS LIQUID-METAL ION-SOURCE AS A DOPANT SOURCE IN FOCUSED ION-BEAM SYSTEMS

被引：6

作者：

HIGUCHIRUSLI, RH

CORELLI, JC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.340099

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：603 / 610

页数：8

共 12 条

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