APPLICATION OF HIGH-POWER ION-BEAMS FOR TECHNOLOGY

被引：89

作者：

REMNEV, GE ^{[1
]}

SHULOV, VA ^{[1
]}

机构：

[1] AVIAT INST,MOSCOW,RUSSIA

来源：

LASER AND PARTICLE BEAMS | 1993年 / 11卷 / 04期

关键词：

D O I：

10.1017/S0263034600006467

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

引用

页码：707 / 731

页数：25

共 61 条

[1]

ANISIMOV S, 1970, HIGH ENERGY FLUX IMP, P272

[2]

ASAINOV OX, 1987, PHYSIKA CHIMIIA OBRA, V2, P53

[3]

BAGLIN JE, 1980, APPL PHYS LETT, V37, P187

[4]

BASOV NG, 1966, SOV PHYS JETP, V51, P998

[5]

BOIKO VM, 1990, J POVERHNOST, P111

[6]

BOIKO VM, 1989, EFFECT HIGH POWER BE

[7] STRUCTURE OF NEAR-SURFACE LAYERS OF GAAS AND SI CRYSTALS IRRADIATED BY POWERFUL ION-BEAMS [J].

BOJARKO, EY ;

VERIGIN, AA ;

KOSCHEEV, VP ;

KRJUCHKOV, YY ;

POGREBNJAK, AD .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (02) :162-164

[8]

CHEN LJ, 1982, MATER RES SOC S P, V7, P319

[9]

CHEREPNIN NV, 1973, M SOVETSKOE RADIO, P384

[10]

CHISTIAKOV SA, 1988, P BEAMS 88, P808

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