THE REACTIVE SPUTTERING OF OXIDES AND NITRIDES

被引:16
作者
HOWSON, RP
机构
[1] Dept of Physics, Loughborough University of Technology, Loughborough, Leics.
关键词
D O I
10.1351/pac199466061311
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Recent developments in the techniques used to produce surface layers of oxides and nitrides by reactive sputtering are considered. These techniques have to give films which can be produced onto large-area, low-temperature substrate materials, such as glass and polymer. It is shown that this has led to the adoption of ion-assisted processes. In particular the use of plasmas leaked from magnetron sputtering sources is shown to have the ability to create the intense low-energy bombardment that has been found to be most beneficial in forming the film structures that are required. Examples of the use of reactive unbalanced magnetron sputtering for the preparation of oxides and nitrides of silicon, titanium, aluminium etc. is given with discussion of their application to provide surface coatings having desirable properties.
引用
收藏
页码:1311 / 1318
页数:8
相关论文
共 20 条
[1]  
CHAPIN J, 1979, Patent No. 4166784
[2]   ION-ASSISTED REACTIVE DEPOSITION PROCESSES FOR OPTICAL COATINGS [J].
EBERT, J .
SURFACE & COATINGS TECHNOLOGY, 1990, 43-4 (1-3) :950-962
[3]  
GRUBB AD, 1982, P SOC PHOTO-OPT INST, V325, P74, DOI 10.1117/12.933289
[4]   THE FORMATION AND CONTROL OF DIRECT-CURRENT MAGNETRON DISCHARGES FOR THE HIGH-RATE REACTIVE PROCESSING OF THIN-FILMS [J].
HOWSON, RP ;
SPENCER, AG ;
OKA, K ;
LEWIN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1230-1234
[5]  
HOWSON RP, 1993, NATO ASI SERIES E
[6]  
HOWSON RP, 1991, P IPAT, V91, P128
[7]  
HOWSON RP, 1991, THIN SOLID FILMS, V196, P3
[8]  
HOWSON RP, 1985, J VAC SCI TECH A, V10, P1774
[9]   HIGH-RATE ALUMINUM-OXIDE DEPOSITION BY METAMODE(TM) REACTIVE SPUTTERING [J].
LEHAN, JP ;
SARGENT, RB ;
KLINGER, RE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (06) :3401-3406
[10]  
LEWIN R, 1985, VACUUM, V36, P95