LOW-ENERGY ELECTRON-MICROSCOPY OF NANOMETER SCALE PHENOMENA

被引：7

作者：

BAUER, E

MUNDSCHAU, M

SWIECH, W

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期

关键词：

D O I：

10.1116/1.585581

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The physical principles of low energy electron microscopy (LEEM) are discussed. The application of this nonscanning imaging method to the study of surface phenomena on the 10 nm scale is illustrated by examples of the growth and desorption of metal films on metal and semiconductor substrates as well as by phase transitions in these films.

引用

页码：403 / 408

页数：6

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