NB3AL THIN-FILM SYNTHESIS BY ELECTRON-BEAM COEVAPORATION

被引：36

作者：

KWO, J ^{[1
]}

HAMMOND, RH ^{[1
]}

GEBALLE, TH ^{[1
]}

机构：

[1] STANFORD UNIV,WW HANSEN LABS PHYS,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 03期

关键词：

D O I：

10.1063/1.327783

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1726 / 1732

页数：7

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